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NAI-LOK High and Low Pressure Gas Valve 1/4'' Metal Face Seal Vacuum System Diaphragm Valve For Semiconductor

NAI-LOK High and Low Pressure Gas Valve 1/4'' Metal Face Seal Vacuum System Diaphragm Valve For Semiconductor


1. Visible indicator handle

2. Compact designed body with minimal dead space

3. Excellent finish level of wetted areas with NAI-LOK’s own electro polish precess

4. Specification 316L SS material for ultra-pure,flammable,or toxic fluid lines in semiconductor manufacturing equipment and facilities.

5. All valves are helium leak tested.


  • Technical Parameters
  • Main feature
  • Operating range
Body Material:316L Stainless Steel
Port Type:Face seal female
Face seal male
Tube weld stub available
Size:1/4 in/1/2 in/3/4 in
Operating Pressure:145psig (1 Mpa);2900psi(20.5 Mpa)
DiaphragmNickel-cobalt alloy
SeriesUDM/UDBSeries
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