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12
316L Stainless Steel Metal Face Seal 3500psi Pressure Regulator Electropolished Tube Weld UHP Gases Pressure Regulator for Semiconductor Vacuum System

316L Stainless Steel Metal Face Seal 3500psi Pressure Regulator Electropolished Tube Weld UHP Gases Pressure Regulator for Semiconductor Vacuum System


1. SS316L construction.

2. 10 µin. Surface finish.

3. Hastelloy internals for corrosion resistance.

4. For high flow rates at point of use application.

5. Cleaned,assembled and packaged for high purity semiconductor applications.

6. Each regulator is individually assembled,pressure tested,helium leak tested.


  • Technical Parameters
  • Main feature
  • Operating range
Body Material:316L Stainless Steel
Port Type:Face seal female
Face seal male
Tube weld stub available
Size:1/4 in.
Port:2 / 3 /4 ports
Inlet Pressure:3,500psig (241 bar)
Delivery Pressure Range:1 to 30psig (0.07 to 2 bar)
2 to 60psig (0.14 to 4 bar)
2 to 100psig (0.14 to 7 bar)
5 to 150psig (0.34 to 10 bar)
SeriesUR100 Series
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