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Recommend
NAI-LOK Ultra-high purity (UHP) gas panels for gas delivery system
1. SS316L construction
2. 10μin. surface finish(25μin.optional)
3. Vacuum to 3500 pisg(241 bar)inlet
4. 1to 150psig (0.07 to 10bar)outlet
5. Cleaned,assembled and packaged for high purity semiconductor applications
6. Flow rates
- Standard to 30 slpm
-HF option to 120slpm
7. Regulator of choice for point of use applications
- Technical Parameters
- Main feature
- Operating range
Model Number
UR100
Temperature of Media
Normal Temperature
Media
Gas
Port Size
1/4 FACE SEAL
Inlet Vacuum
2900psi(200bar)
Outlet Vacuum
1 to 150psi
Flow rates
HF option to 120 slpm
size
1/4" or 3/8"
surface finish
10 μim
optional
25 μim
Material
Stainless Steel 316
Suitable gas
High purity gas
Type
single stage
