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Recommend
Pressure regulator for ultra high purity gases 6N
1. SS316L construction.
2. 10 µin. Surface finish.
3. Hastelloy internals for corrosion resistance.
4. For high flow rates at point of use application.
5. Cleaned,assembled and packaged for high purity semiconductor applications.
6. Each regulator is individually assembled,pressure tested,helium leak tested.
- Technical Parameters
- Main feature
- Operating range
| Body Material: | 316L Stainless Steel |
| Port Type: | Face seal female Face seal male Tube weld stub available |
| Size: | 1/4 -1/2 |
| Port: | 2 / 3 /4 ports |
| Inlet Pressure: | 3,500psig (241 bar) |
| Delivery Pressure Range: | 1 to 30psig (0.07 to 2 bar) 2 to 60psig (0.14 to 4 bar) 2 to 100psig (0.14 to 7 bar) 5 to 150psig (0.34 to 10 bar) |
| Series | UR100 Series |
